FIB (Quanta 3D) 이미지

FIB (Quanta 3D)

Model
Quanta 3D FEG
Location
L5115C
Tel
02-958-6973

Quanta 3D is unique to other dual column instruments in that it is the first multi-mode SEM to harness the added power of the FIB (Focused ion beam). FIB technology is a proven technology that is now finding applications in research areas traditionally supported by SEM. The value of FIB is that it is complementary to SEM, delivering the ability to explore a third dimension of data below the surface of a sample, using various gases by environmental function and enabling a greater understanding of material characteristics and structures.

Specifications

  • Manufacturer : FEI (Quanta 3D FEG)

  • Accelerating Voltage : 5 ~ 30 kV

  • Image Resolution : < 1.2 nm (@ 30 kV, Ga ion)

  • Magnification : 30 ~ 1,280,000 X

Applications

  • SE/ BSE image

  • Nano manipulator

  • Nano patterning

  • Charge Neutralizer / Direct Ion imaging

  • Electron / ion beam deposition (<20 nm)

  • Ion beam milling

  • High Vacuum

  • Low vacuum (0.1~20 Torr)

  • ESEM (auxiliary gas available)

  • BSE detector

  • STEM imaging

  • EDS

  • Cryo-transfer system (Alto 2500)

  • Vacuum-transfer system

Application examples

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FIB (Quanta 3D)

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