XPS (PHI 5000 VersaProbe) 이미지

XPS (PHI 5000 VersaProbe)

Model
PHI 5000 VersaProbe (ULVAC PHI, Japan)
Location
L5113B
Tel
02-958-5975

XPS (X-ray Photoelectron Spectroscopy)/ESCA (Electron Spectroscopy for Chemical Analysis) is used to obtain both elemental and chemical information about a sample surface. When the surface of sample is excited with X-rays, high resolution energy analysis of photo-electrons emitted from atoms near the surface can be used to characterize a variety of inorganic and organic materials.

Specifications

  • Min. spatial resolution : 10 um

  • Min. resolution : 0.48 eV (Ag 3d5/2)

  • Source : Monochromatized Al Kα

  • Automated specimen stage : X, Y, Z, R, T

  • Ion etch gun (Ar+)

  • Dual beam charge neutralization

  • Scanning electron gun (AES/SEM), UPS

Applications

  • Identifying elements of surface

  • Chemical state identification

  • Quantitative analysis

  • Depth profiling

  • Multipoint/Line scan/Area scan analysis

  • Image mapping analysis

  • Work function measurement

Application examples

예약가능 예약불가

장비명

XPS (PHI 5000 VersaProbe)

예약날짜

예약시간 원하는 시간대를 선택해 주세요.

예약현황

    운영 및 예약 시간 안내

    오전 09:00 ~ 12:00 오후 13:00 ~ 18:00 예약자가 있는 시간대는 예약불가입니다.