AES Nanoprobe (PHI 700) 이미지

AES Nanoprobe (PHI 700)

Model
PHI-700 (ULVAC-PHI, Japan)
Location
L5113E
Tel
02-958-5974

Scanning AES (Auger Electron Spectroscopy) Nanoprobe is a fast non-destructive analytical technique used to identify and quantify the chemical elements in the top few atomic layers of a surface or exposed interface. Under ultra high vacuum conditions, a focused beam of electrons impinges the sample surface and the emitted auger electrons are analyzed by the electron energy analyzer.

Specifications

  • Base pressure : < 5 x 10-10 Torr

  • Auger SEM spatial resolution : 7 nm ( 20 keV, 1 nA )

  • Energy resolution : < 0.5%

  • CuLMM sensitivity : > 780 Kcps (10 keV, 10 nA )

  • S/N ratio : > 700 (10 keV, 10 nA )

  • Practical depth profile impact voltage : 100-5000 V

  • Shadowing during imaging : No shadowing

  • Analyzer type : CMA

  • Compucentric zalar depth profiling : Yes

Applications

  • SEM image

  • Elemental identification (Z≥3)

  • Elemental quantification

  • Depth profiling with ion beam sputtering

  • Chemical state identification

Application examples

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AES Nanoprobe (PHI 700)

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