D-SIMS (IMS4fE7) 이미지

D-SIMS (IMS4fE7)

Model
IMS-4fE7 (CAMECA, France)
Location
L5113F
Tel
02-958-5984

Dynamic SIMS (Secondary Ion Mass Spectrometry) is the mass spectrometry of ionised particles which emitted when a surface is bombarded by energetic primary particles, usually ions. (for example, Ar+, Ga+, Cs+, O_2+)

Specifications

  • Reactive primary ions : O_2+, Cs+

  • Primary beam diameters

  • ( O_2+ : 0.3 ~ 200 um, 0.5 ~ 8 keV, Cs+ : 0.2 ~ 100 um, 1.6 ~ 14.5 keV )

  • Control of incidence angle by pri./sec. voltage ratio

  • Mass resolution M/dM: 300 ~ 25,000 (10 ~ 90%)

  • Transmission : 40% at M/dM = 800

  • Ion microscope and ion microprobe modes

Applications

  • Surface analysis : Most of the signal comes from the top 2-3 atomic layers

  • Depth analysis, imaging mapping

  • Elemental analysis : Analysis of the full periodic table (from H to U and above)

  • Typical detection limits from ppm to ppb

  • Analysis of any solid samples insulator, semiconductor, conductive samples

  • Isotope ratio

  • 2D ~ 3D analysis

Application examples

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D-SIMS (IMS4fE7)

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