TOF-SIMS (TOF-SIMS5) 이미지

TOF-SIMS (TOF-SIMS5)

Model
TOFSIMS.5 (ION-TOF, Germany)
Location
L5113D
Tel
02-958-5977

Time-of-flight Secondary Ion Mass Spectrometry (TOF-SIMS) is the mass spectrometry of ionized particles which emitted when a surface is bombarded by energetic primary particles, usually ions (for example, Bi+, C60+, Cs+). It provides detailed elemental and molecular information about surfaces, thin layer, interfaces, and full threedimensional analysis of the samples. TOF-SIMS is capable of four basic modes of operation; Surface Spectroscopy, Surface Imaging, Depth Profiling and 3D Analysis.

Specifications

  • Mass resolution : > 11,000 (at m/z = 29)

  • Mass range : > 10,000 amu

  • Sensitivity : 4.5x10^8 Al+/nC @ 7,000 (FWHM)

  • Lateral resolution : < 70 nm (with Bi+)

  • Ion beam : Bi+, C60+, Cs+

  • Ion energy range : 1~10 keV

  • Noise level : < 54 dB

Applications

  • Molecular structural analysis

  • Trace elemental analysis (including H, He)

  • Chemical mapping (SEM, SIMS imaging)

  • Depth profiling

  • 3-D analysis

Application examples

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TOF-SIMS (TOF-SIMS5)

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