XRD (고분해능-HR1) 이미지

XRD (고분해능-HR1)

Model
ATX-G
Location
L1134
Tel
02-958-5958

This diffractometer provides overall evaluation of surfaces and thin film. It allows you to analyze film thickness, surface roughness, and thin film internal structure. The incidence optics uses a parabolically curved artificial multilayer to obtain a strong parallel beam. When a beam parallelized by a multilayer is allowed to enter a four-crystal monochromator, you can obtain an X-ray beam that is further monochromatized and paralled. In such an instance, you can make crystallinity analysis (lattice constants, orientation, composition, and strain) of single-crystal thin films, and super lattice elements that are epitaxially grown relative to a substrate, film thickness evaluation, super lattice period analysis, and reciprocal lattice intensity map measurements.

Specifications

  • Max. power : 18 kW (60 kV, 300 mA)

  • Using power : 12 kW (40 kV, 300 mA)

  • X-ray target : Cu

  • Goniometer radius : 300 mm

  • Optics: Parabolic multi-layer crystal, 2-channel cut Ge (220),

  • 4-channel cut Ge (220), Analyzer

  • 2 scan range : -3° ~ 158°

Applications

  • XRR (X-ray reflectivity)

  • RC (Rocking curve, (2theta-omega, omega))

  • RSM (Reciprocal space mapping)

  • In-plane XRD

Application examples

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장비명

XRD (고분해능-HR1)

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    오전 09:00 ~ 12:00 오후 13:00 ~ 18:00 예약자가 있는 시간대는 예약불가입니다.