ESEM 이미지

ESEM

Model
FEI (XL-30 FEG)
Location
L5145
Tel
02-958-5972

E-SEM (Environmental SEM) is capable of high resolution imaging without surface coating. Controlled atmosphere can be used to perform in-situ, high temperature experiments and water-containing samples can be examined without drying or sample treatment. Various analytical attachments are available for electro-optical, chemical and crystallographic characterization.

Specifications

  • Accelerating voltage : < 30 kV

  • SEM resolution : < 2 nm

  • Magnification : 10 ~ 500,000 X

  • Vacuum range : 101 ~ 10-8 torr

  • Peltier cool stage

Applications

  • SE/BSE imaging

  • Cooling stage

  • Low vacuum

Application examples

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ESEM

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