EPMA 이미지

EPMA

Model
JEOL (JXA-8500F)
Location
L5145
Tel
02-958-5540

The FEG-EPMA (Field Emission Gun Electron Probe Micro Analyzer) utilizes X-ray spectrometry and allows for high speed, high accuracy qualitative and quantitative in-depth surface analysis as well as area analysis. The FEG-EPMA employs a patented "in-lens" Schottky type field emission electron gun. WDS (wavelength dispersive X-ray spectrometer), high probe current, and small probe diameter, the FEG-EPMA is capable of extreme elemental analysis of sub-micron areas.

Specifications

  • Source : Schottky FEG

  • Accelerating voltage : 1 ~ 30 kV

  • Image resolution : 3 nm (WD : 11 mm, 30 kV)

  • Magnification : 40 ~ 300,000X (WD : 11 mm)

  • WDS (3ch) and EDS (1ch)

  • Type of crystals : TAP, LDE2, LIF, LIFH, PETJ, PETH

Applications

  • Topography and composition images

  • Qualitative & quantitative analysis

  • Line analysis

  • Map analysis & Phase analysis

Application examples

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EPMA

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