APT (Atom Probe Tomography) 이미지

APT (Atom Probe Tomography)

Model
LEAP 4000X HR
Location
L5115C
Tel
02-958-4946

Atom probe microscopy(APM) provides thee-dimensional (3D) analytical mapping of materials with atomic scale resolution and so offers unique insights into both the chemical composition and atomic structure of matter.

Specifications

  • Manufacturer : CAMECA (LEAP4000XHR)

  • Time Of Flight (TOF)

  • Mass Resolving Power : >1100

  • Lateral Resolution : < 0.4 nm

  • Depth Resolution : < 0.2 nm

  • Analytical sensitivity : < 10 appm

Applications

  • Precipitates

  • Cluster analysis

  • Internal interfaces, grain boundary analysis

  • Local phase transformations

  • Analysis of Semiconductor and Microelectronic Devices: High-k dielectrics, 3D dopant distribution, Boron out-diffusion in strained silicon, 3D devices

  • Metals and Advanced Materials: Metallic alloys, Thin films, Dielectrics, Nanowire, Ceramics

Application examples

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APT (Atom Probe Tomography)

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