- XE-100 (Park Systems, Korea)
Atomic force microscopy (AFM) is a very high-resolution type of scanning probe microscopy, with demonstrated resolution of fractions of a nanometer, more than 1000 times better than the optical diffraction limit. The AFM is one of the foremost tools for imaging, measuring, and manipulating matter at the nanoscale. The information is gathered by "feeling" the surface with a mechanical probe.
Decoupled XY and Z scanner
Scan range of XY scanner : 50 μm
Scan range of Z scanner : 25 μm
Resolution : 2~3 Å lateral, 0.1 Å vertical
Accessory : Heating sample stage (~250 ℃)
Contact, Non-contact, Tapping mode
Lateral force microscopy (LFM)
Conductive AFM (I-AFM, CAFM)
Electrostatic force microscopy (EFM)
Electric information : Surface potential, charge distribution
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